Optimizing High-Throughput SEM for Large-area Defect Characterization in AM Steel

Computational Article

Contents

Table SI.1:Overview of algroithm detection Parameters used for raw images

Pixel Size [nm]	Dwell time [µs]	Gaussian Fidelity	Gaussian Range	Canny Sigma	K size	Canny Minimum	Canny Maximum
48.8	1	30	351	3.10	19	7	41
	0.75	40	351	3.10	19	7	41
	0.5	40	351	3.10	19	7	41
	0.3	20	191	10.00	25	5	20
	0.1	20	191	10.00	25	5	20
97.6	5	25	151	2.10	13	77	126
	1	30	111	2.10	13	57	106
	0.75	61	425	33.90	5	137	87
	0.5	35	151	2.10	13	40	106
	0.3	40	191	13.00	13	15	50
	0.1	40	191	15.00	15	20	50
195.3	10	30	111	2.10	13	67	106
	5	42	421	1.40	115	144	98
	1	41	305	34.50	65	141	215
	0.75	42	421	1.40	115	144	98
	0.5	51	257	72.40	69	225	91
	0.3	42	421	1.40	115	144	98
	0.1	40	191	3.20	21	20	50
390.6	10	33	153	11.06	31	33	212
	5	37	153	9.08	43	0	252
	1	37	197	33.71	31	138	125
	0.75	47	119	34.46	51	73	178
	0.5	51	189	50.00	51	0	163
	0.3	23	117	43.72	5	150	165
	0.1	45	209	11.50	61	14	184

Table SI.2:Overview of algroithm detection Parameters used for denoised images

Pixel Size [nm]	Dwell time [µs]	Gaussian Fidelity	Gaussian Range	Canny Sigma	K size	Canny Minimum	Canny Maximum
48.8	1	17	503	2.41	15	167	71
	0.75	10	561	27.45	71	119	219
	0.5	13	515	50.00	51	180	255
	0.3	7	513	36.30	45	110	225
	0.1	7	361	9.28	39	99	249
97.6	5	16	219	9.47	51	219	211
	1	12	211	6.78	45	58	27
	0.75	10	319	12.22	51	11	119
	0.5	10	277	24.13	51	9	248
	0.3	10	321	0.10	51	0	255
	0.1	9	317	1.56	51	95	120
195.3	10	14	127	3.10	9	50	102
	5	13	109	7.23	35	14	184
	1	14	99	0.10	27	127	169
	0.75	13	109	0.10	35	22	255
	0.5	13	109	0.10	51	0	255
	0.3	10	107	0.10	3	18	203
	0.1	11	123	23.07	71	45	255
390.6	10	11	65	20.21	71	227	229
	5	9	109	2.76	35	123	132
	1	10	73	50.00	19	255	199
	0.75	15	79	45.39	3	251	164
	0.5	3	3	0.49	39	0	134
	0.3	16	151	24.43	49	204	196
	0.1	20	143	2.02	25	86	41

Supplementary Information